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Home > products > Gas Detector Sensor >
1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor

1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor

High Linearity Infrared Gas Sensor

0 200mTorr Infrared Gas Sensor

1 264ppm Infrared Gas Sensor

Place of Origin:

CHINA

Brand Name:

KACISE

Certification:

CE

Model Number:

KGD-MQ-537

Contact Us
Request A Quote
1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor
Product Details
Detection Principle:
NDIR
Detected Gases:
SiF4, CF4, SF6, NF3, CO2
Measuring Range:
1 - 264ppm (0 - 200mTorr)
Repeatability:
±0.5%
Linearity:
±1%F.S.
Detection Limit:
1ppm
Highlight:

High Linearity Infrared Gas Sensor

,

0 200mTorr Infrared Gas Sensor

,

1 264ppm Infrared Gas Sensor

Payment & Shipping Terms
Minimum Order Quantity
1PCS
Packaging Details
each unit has individual box and all boxes are packed in standard packages or customers requests available
Delivery Time
5-8 work days
Payment Terms
L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability
1000 Piece/Pieces per Week negotiable
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Product Description

KGD - MQ - 537 Infrared Gas Sensor

Product Introduction

The KGD - MQ - 537 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as SiF4, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.

1 264ppm 0 200mTorr Measuring Range KGD MQ 537 Infrared Gas Sensor 0

Product Features

  • Utilizes NDIR technology, supports multi - gas monitoring (including SiF4, CF4, SF6, NF3, CO2, etc.).
  • Fast response time and high sensitivity.
  • No consumables.
  • Analog/digital communication.
  • Modular design for easy integration.

Technical Parameters

Parameter Details
Detection Principle NDIR
Detected Gases SiF4, CF4, SF6, NF3, CO2
Measuring Range 1 - 264ppm (0 - 200mTorr)
Repeatability ±0.5%
Linearity ±1%F.S.
Detection Limit 1ppm
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Tel：86--17719566736
Email：support@kacise.com
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Xi'an Kacise Optronics Co.,Ltd.
Xi'an Kacise Optronics Co.,Ltd. is a professional manufacturer of measuring instruments , located in Xi'an City.
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