Name: KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications
Brand: Xi'an Kacise Optronics Co.,Ltd.
SKU: KGD-MQ-537
Price: 72.00 USD
Availability: InStock

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KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications

High Linearity Infrared Gas Sensor

0 200mTorr Infrared Gas Sensor

1 264ppm Infrared Gas Sensor

Place of Origin:

CHINA

Brand Name:

KACISE

Certification:

Model Number:

KGD-MQ-537

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Product Details

Detection Principle:

NDIR

Detected Gases:

SiF4, CF4, SF6, NF3, CO2

Measuring Range:

1 - 264ppm (0 - 200mTorr)

Repeatability:

±0.5%

Linearity:

±1%F.S.

Detection Limit:

1ppm

Highlight:

High Linearity Infrared Gas Sensor

0 200mTorr Infrared Gas Sensor

1 264ppm Infrared Gas Sensor

Payment & Shipping Terms

Minimum Order Quantity

1PCS

Packaging Details

each unit has individual box and all boxes are packed in standard packages or customers requests available

Delivery Time

5-8 work days

Payment Terms

L/C,D/A,D/P,T/T,Western Union,MoneyGram

Supply Ability

1000 Piece/Pieces per Week negotiable

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Product Description

KGD-MQ-537 Infrared Gas Sensor

Product Overview

KGD - MQ - 537 Infrared Gas Sensor

The KGD-MQ-537 Infrared Gas Sensor utilizes Non-Dispersive Infrared (NDIR) technology to accurately measure gases including SiF4, CF4, SF6, NF3, and CO2 in semiconductor applications. Designed with compatibility for common equipment dimensions, flanges, and communication protocols, this sensor is ideal for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, helping to reduce cleaning time, cut costs, and increase production.

Key Features

Utilizes NDIR technology with multi-gas monitoring capability (SiF4, CF4, SF6, NF3, CO2, etc.)
Fast response time and high sensitivity
No consumables required
Analog/digital communication options
Modular design for easy integration

Technical Specifications

Parameter	Details
Detection Principle	NDIR
Detected Gases	SiF4, CF4, SF6, NF3, CO2
Measuring Range	1-264ppm (0-200mTorr)
Repeatability	±0.5%
Linearity	±1% F.S.
Detection Limit	1ppm

Tags：

KGD-MQ-537 NDIR Infrared Gas Sensor with Multi-Gas Monitoring and 1ppm Detection Limit for Semiconductor Applications

High Linearity Infrared Gas Sensor

0 200mTorr Infrared Gas Sensor

1 264ppm Infrared Gas Sensor

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1 264ppm Infrared Gas Sensor

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